Imaging microspectrometer with space-variant adaptive dispersion incorporating a MEMS mirror array

Eric A. Shields; Wei Liu; Joseph J. Talghader; James R. Leger

doi:10.1117/12.505681

10 November 2003 Imaging microspectrometer with space-variant adaptive dispersion incorporating a MEMS mirror array

Eric A. Shields, Wei Liu, Joseph J. Talghader, James R. Leger

Proceedings Volume 5177, Gradient Index, Miniature, and Diffractive Optical Systems III; (2003) https://doi.org/10.1117/12.505681
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We report the design, fabrication, and testing of a novel imaging micro-spectrometer system for the 500-1000 nm wavelength range. The space-variant design incorporates a linear array of MEMS mirrors in order to vary the dispersion spatially on a pixel-by-pixel basis. A planar-optics geometry is used so that the spectrometer optics are contained on a single piece of bulk fused silica. The object to be investigated is imaged onto a linear array of tilting MEMS mirrors that define the spectrometer slit. Each individual MEMS mirror tilts to send the light to one of three blazed gratings of differing dispersive powers. Depending on the wavelength and selected grating the spectral resolution is between 5 and 20 nm. The collimating and focusing mirrors of the spectrometer are fabricated in standard photoresist via grayscale photolithography with a custom high-energy beam-sensitive (HEBS) photomask. A reflow at 70 degrees Celsius for 40 hours is necessary to achieve diffraction-limited performance. The blazed gratings are fabricated in SU-8 via direct-write electron beam lithography. Spectrometer results with a variety of lasers and gaseous discharge tubes are presented and indicate that system performs as expected.

Citation Download Citation

Eric A. Shields, Wei Liu, Joseph J. Talghader, and James R. Leger "Imaging microspectrometer with space-variant adaptive dispersion incorporating a MEMS mirror array", Proc. SPIE 5177, Gradient Index, Miniature, and Diffractive Optical Systems III, (10 November 2003); https://doi.org/10.1117/12.505681

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available