Resolution improvement of surface photorelief recording

Vladzimir V. Mahilny; Yuri V. Gritsai; Aliaksandr I. Stankevich; Aleksei L. Tolstik; Lutz Wenke

doi:10.1117/12.518102

3 September 2003 Resolution improvement of surface photorelief recording

Vladzimir V. Mahilny, Yuri V. Gritsai, Aliaksandr I. Stankevich, Aleksei L. Tolstik, Lutz Wenke

Proceedings Volume 5135, Optical Information, Data Processing and Storage, and Laser Communication Technologies; (2003) https://doi.org/10.1117/12.518102
Event: International Conference on Lasers, Applications, and Technologies 2002, 2002, Moscow, Russian Federation

Abstract

The surface relieves shaped in processes of thermoannealing of exposed polymer layers containing photosensitive admixtures are investigated. Several ways of resolving ability improvement of the relief recording are proposed and implemented experimentally. They are based on: (1) retardation of deformation reate, (2) depression of glass transition temperature of a polymeric matrix, (3) considerable increase of annealing temperature of the samples and (4) overlapping of the recording and thermal developing processes under photorelief shaping by one laser pulse. The last method has made it possible to record surface gratings with spatial frequencies in the limits of 50-1500 mm^-1.

Citation Download Citation

Vladzimir V. Mahilny, Yuri V. Gritsai, Aliaksandr I. Stankevich, Aleksei L. Tolstik, and Lutz Wenke "Resolution improvement of surface photorelief recording", Proc. SPIE 5135, Optical Information, Data Processing and Storage, and Laser Communication Technologies, (3 September 2003); https://doi.org/10.1117/12.518102

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