3D micro channels in laminated resins by UV laser ablation

Yoshikazu Yoshida

doi:10.1117/12.540471

18 November 2003 3D micro channels in laminated resins by UV laser ablation

Yoshikazu Yoshida

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540471
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

This paper describes the fabrication of micro-channels in resin for micro-fluidic devices such as the μ-TAS (Micro Total Analysis System) by a UV laser ablation. Numbers of heat-hardening resin-films are piled up a soda glass. A laser fabricates a part of the channel at the each film every lamination, and then 3-D confluence channels are fabricated. The channel sizes are widths of 20 - 150 μm and depths of 20 - 30 μm. The through holes are made in the laminate film by the laser. Inlet pipe for a micro-pump are inserted into the hole. Deionized water is injected into the channels with a microinjection pump. This flow rate is 5 μL/min. There is no damage to the channel, inlet, and outlet.

Citation Download Citation

Yoshikazu Yoshida "3D micro channels in laminated resins by UV laser ablation", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540471

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