Paper
14 October 2003 Microsystems: from technologies to products
Peter Ryser
Author Affiliations +
Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514717
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India
Abstract
In this paper, we outline the process leading from technologies to successful products in the MEMS (Microelectromechanical Systems) and MST (Microsystems Technology) field. The development of new products involves a lot of factors, such as mature technologies, interdisciplinary team, identifying the right business potential and long term oriented investors. The paper summarizes a survey of different technologies and point out that packaging, test and calibration are still major shortcomings for the concerned industries.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Ryser "Microsystems: from technologies to products", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); https://doi.org/10.1117/12.514717
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KEYWORDS
Microsystems

Sensors

Microelectromechanical systems

Packaging

Ceramics

Manufacturing

Biotechnology

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