Comparison of vector theories for aerial image calculation

Byoung Sup Ahn; Sonny Y. Zinn; Sung-Woon Choi; Jung-Min Sohn

doi:10.1117/12.485354

26 June 2003 Comparison of vector theories for aerial image calculation

Byoung Sup Ahn, Sonny Y. Zinn, Sung-Woon Choi, Jung-Min Sohn

Proceedings Volume 5040, Optical Microlithography XVI; (2003) https://doi.org/10.1117/12.485354
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

In simulation of optical lithography it is well known that for high-NA the coupling between the vector components of the electromagnetic wave cannot be ignored and a vector diffraction theory should be employed to calculate aerial images. Commercial programs produce the same aerial image for scalar diffraction theory. When vector models are selected, they give the consistent images in latest versions. However formula of vector models give the different mathematical formula. To understand the origin of the difference, we compared the vector models adopted by Refs.

Citation Download Citation

Byoung Sup Ahn, Sonny Y. Zinn, Sung-Woon Choi, and Jung-Min Sohn "Comparison of vector theories for aerial image calculation", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); https://doi.org/10.1117/12.485354

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