Ultra fast ion shutter employing a laser-produced plasma

Hidehiko Yashiro; Tatsuya Aota; Kentaro Nishigori; Yoshifumi Ueno; Toshihisa Tomie

doi:10.1117/12.483745

16 June 2003 Ultra fast ion shutter employing a laser-produced plasma

Hidehiko Yashiro, Tatsuya Aota, Kentaro Nishigori, Yoshifumi Ueno, Toshihisa Tomie

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.483745
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

In order to protect a multilayer mirror from sputtering or ion implantation, high-energy ions ejected from EUV source plasma are to be blocked. We propose use of a laser-produced plasma as an ultra-fast shutter. Ion signal form an ion-source plasma dropped abruptly by two orders of magnitude to a noise level after the shutter plasma generation. The stopping effect for the high-energy ions was observed to reduce as the distance of shutter plasma expansion increases, but the suppression of ions below detection level was observed up to 10 mm. We concluded that reduction of ion signal was caused by in-take of the source plasma flow into the stream of the shutter plasma.

Citation Download Citation

Hidehiko Yashiro, Tatsuya Aota, Kentaro Nishigori, Yoshifumi Ueno, and Toshihisa Tomie "Ultra fast ion shutter employing a laser-produced plasma", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.483745

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available