Development of a 10-kHz capillary discharge EUV lamp

Ouassima Sarroukh; Eric Robert; Thierry Gonthiez; Raymond Viladrosa; Moulay M. Idrissi; Claude Fleurier; Jean-Michel Pouvesle; Christophe Cachoncille

doi:10.1117/12.482330

16 June 2003 Development of a 10-kHz capillary discharge EUV lamp

Ouassima Sarroukh, Eric Robert, Thierry Gonthiez, Raymond Viladrosa, Moulay M. Idrissi, Claude Fleurier, Jean-Michel Pouvesle, Christophe Cachoncille

Author Affiliations +

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.482330
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

In this paper, an EUV lamp development based on high repetition rate compact capillary discharge devices is presented. The first lamp, named CAPELLA (Capillary EUV Lamp for Lithography Approach) emits up to 1 W in-band and has been selected as the illumination source of the first experimental European exposure tool (BEL). An industrial version of CAPELLA named PROXIMA has recently been operated and is the first commercial product of a new spin-off of GREMI called IGETECH. The design of a 10 kHz capillary discharge likely to emit up to 10 W in-band and labelled as ATλAS (AT wavelength Alternative Sources) is finally documented.

Citation Download Citation

Ouassima Sarroukh, Eric Robert, Thierry Gonthiez, Raymond Viladrosa, Moulay M. Idrissi, Claude Fleurier, Jean-Michel Pouvesle, and Christophe Cachoncille "Development of a 10-kHz capillary discharge EUV lamp", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.482330

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available