Comprehensive investigation of subpixel edge detection schemes in metrology

Vidya Venkatachalam; Richard M. Wasserman

doi:10.1117/12.474070

22 May 2003 Comprehensive investigation of subpixel edge detection schemes in metrology

Vidya Venkatachalam, Richard M. Wasserman

Proceedings Volume 5011, Machine Vision Applications in Industrial Inspection XI; (2003) https://doi.org/10.1117/12.474070
Event: Electronic Imaging 2003, 2003, Santa Clara, CA, United States

Abstract

A common problem in optical metrology is the determination of the exact location of an edge. In practice, however, exact edge information is generally impossible to obtain. The best we can do is to locate the edge with very high precision through the use of sub-pixeling techniques. In this paper, we review several sub-pixel edge detection schemes and compare them with respect to two figures of merit - resolution accuracy and repeatability. Towards this end, we design experiments to determine the relative performance of different algorithms using a simulated system model. Finally, we verify the model accuracy by performing similar experiments on an off-line test vision system. Our experiments achieve a two-fold purpose. First, they provide a reliable indication of the relative performance of the different algorithms under similar test conditions. Next, by validating the results obtained from the simulated model with the results from the test system, they illustrate a methodology to simulate a real measurement system. This is significant because the simulated model can be used to generate data to quickly evaluate algorithms without the need to conduct expensive and time-consuming data collection experiments. We expect that this will be of considerable value to researchers in the field.

Citation Download Citation

Vidya Venkatachalam and Richard M. Wasserman "Comprehensive investigation of subpixel edge detection schemes in metrology", Proc. SPIE 5011, Machine Vision Applications in Industrial Inspection XI, (22 May 2003); https://doi.org/10.1117/12.474070

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