Low-temperature plasma-deposited microcrystalline silicon thin films: an emerging material for stable thin film transistors

Pere Roca i Cabarrocas; Samir Kasouit; B. Kalache; Regis Vanderhaghen; Y. Bonnassieux; M. Elyaakoubi; I. D. French

doi:10.1117/12.476827

16 May 2003 Low-temperature plasma-deposited microcrystalline silicon thin films: an emerging material for stable thin film transistors

Pere Roca i Cabarrocas, Samir Kasouit, B. Kalache, Regis Vanderhaghen, Y. Bonnassieux, M. Elyaakoubi, I. D. French

Author Affiliations +

Proceedings Volume 5004, Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas; (2003) https://doi.org/10.1117/12.476827
Event: Electronic Imaging 2003, 2003, Santa Clara, CA, United States

Abstract

Top gate and bottom gate microcrystalline silicon thin film transistors (TFTs) have been produced by the radio frequency glow discharge technique using three preparation methods: the standard hydrogen dilution of silane in hydrogen, the use of the layer-by-layer technique, and the use of SiF₄-Ar-H₂ feedstock. In all cases, stable top gate TFT with mobility values around 1 cm²/V.s have been achieved, making them suitable for circuit on glass applications. Moreover, the use of SiF₄ gas combined with specific treatments of the a-SiN:H dielectric in bottom gate TFTs, fully compatible with today's a-Si:H process, lead to lateral growth of the silicon crystallites and an enhancement of the mobility to reach stable values of around 3 cm²/V.s.

Citation Download Citation

Pere Roca i Cabarrocas, Samir Kasouit, B. Kalache, Regis Vanderhaghen, Y. Bonnassieux, M. Elyaakoubi, and I. D. French "Low-temperature plasma-deposited microcrystalline silicon thin films: an emerging material for stable thin film transistors", Proc. SPIE 5004, Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas, (16 May 2003); https://doi.org/10.1117/12.476827

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available