Applications of spin-on glass for waveguide and micro-optical systems

Patrick J. Moyer; Ramazan Benrashid; Pascal Dupriez; Faramarz Farahi

doi:10.1117/12.477859

17 January 2003 Applications of spin-on-glass for waveguide and micro-optical systems

Patrick J. Moyer, Ramazan Benrashid, Pascal Dupriez, Faramarz Farahi

Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.477859
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

We have developed a material system, a fabrication process, and optical designs that allow for direct integration of patternable optical components onto microelectronics and optoelectronics platforms. The spin-on-glass is a sol-gel platform that has a low waveguide loss with the ability to incorporate a waveguide amplifier. Our material and process includes the ability to fabricate 3-D structures in a single photolithography step. In this paper, we present details of our fabrication process, general materials characteristics, and some optical designs for planar lightwave circuit platforms.

Citation Download Citation

Patrick J. Moyer, Ramazan Benrashid, Pascal Dupriez, and Faramarz Farahi "Applications of spin-on-glass for waveguide and micro-optical systems", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); https://doi.org/10.1117/12.477859

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