Paper
17 January 2003 Flexible microreactor system for chemical research at moderate temperatures
Author Affiliations +
Proceedings Volume 4982, Microfluidics, BioMEMS, and Medical Microsystems; (2003) https://doi.org/10.1117/12.472739
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
Miniaturization is fast gaining attention in chemical processes that are conventionally carried out on a lab-scale or larger. Major progress and landmarks has been made during the last five years. A microreactor system has been developed for fast catalyst development and process optimization. This paper focuses on the issues of microreactor system design and characterization for fast and accurate reaction analysis.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xun Ouyang and Ronald S. Besser "Flexible microreactor system for chemical research at moderate temperatures", Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); https://doi.org/10.1117/12.472739
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Silicon

Control systems

Chemical analysis

Calibration

Chemical reactions

Gases

Fabrication

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