High-Q RF coils on silicon-integrated circuits

Christopher L. Chua; David K. Fork; Koenraad Van Schuylenbergh; Jeng-Ping Lu

doi:10.1117/12.472875

16 January 2003 High Q RF coils on silicon integrated circuits

Christopher L. Chua, David K. Fork, Koenraad Van Schuylenbergh, Jeng-Ping Lu

Proceedings Volume 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II; (2003) https://doi.org/10.1117/12.472875
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

We report on out-of-plane micro-machined inductors exhibiting record high quality factors (Q) on silicon integrated circuits. The coils are made by three-dimensional self-assembly of stress-engineered structures fabricated with standard semiconductor batch processing techniques. Coils fabricated on low resistance CMOS-compatible silicon exhibit quality factors of over 70 at 1 GHz. BiCMOS test oscillators utilizing these micro-machined coils show significant phase noise reduction over similar oscillators using conventional spiral coils.

Citation Download Citation

Christopher L. Chua, David K. Fork, Koenraad Van Schuylenbergh, and Jeng-Ping Lu "High Q RF coils on silicon integrated circuits", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); https://doi.org/10.1117/12.472875

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available