High-power actuator film materials prepared by PVD process

Hiromasa Yabe; Yoshitake Nishi

doi:10.1117/12.468651

13 November 2002 High-power actuator film materials prepared by PVD process

Hiromasa Yabe, Yoshitake Nishi

Proceedings Volume 4934, Smart Materials II; (2002) https://doi.org/10.1117/12.468651
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Two kinds of high power actuator film materials prepared by PVD process were developed. One is the The Fe-Pd alloy film, which shows large magnetostriction and high magnetostrictive susceptibility at low magnetic field from earth magnetic field to 1 kOe. Another is the hydrogen storage La-Ni alloy film on a polyimide substrate, which was prepared using a flash evaporation method. The hydrogen storage alloy film showed the reversible shape change, which operated by hydrogen absorption and desorptions. This bi-material actuator was driven by the large volume expansion of hydrogen storage La-Ni alloy film. In this study, the strain changes were measured under different loading stresses. The powers of these two actuator materials were larger than that of Ni-Ti alloy commercially used.

Citation Download Citation

Hiromasa Yabe and Yoshitake Nishi "High-power actuator film materials prepared by PVD process", Proc. SPIE 4934, Smart Materials II, (13 November 2002); https://doi.org/10.1117/12.468651

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