Low-voltage micromachining-based scalable optical switch

Junfeng Bao; Ye Yuan; Zhonghui Cao; Xiaodong Wu

doi:10.1117/12.483176

10 September 2002 Low-voltage micromachining-based scalable optical switch

Junfeng Bao, Ye Yuan, Zhonghui Cao, Xiaodong Wu

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483176
Event: Photonics Asia, 2002, Shanghai, China

Abstract

We report a fiber optic switch based on a novel MEMS technology allowing fast switch (<2 ms), excellent isolation (>50dB) and wide bandwidth. Each switch module consists of an electromagnetically actuated gold-coated silicon mirror rotating around a 100 µm diameter shaft and a miniature 5V driven coil. Enabling technology is precision EDM machining and laser cutting. The switch is scalable to 8 X 8 and allows the realization of high capacity cross-connects.

Citation Download Citation

Junfeng Bao, Ye Yuan, Zhonghui Cao, and Xiaodong Wu "Low-voltage micromachining-based scalable optical switch", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483176

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