Electromechanical and optical properties of torsion-mirror actuators for optical switching applications

Wen-Gang Wu; Dachao Li; Yilong Hao; Guizhen Yan; Shijiu Jin

doi:10.1117/12.482300

3 September 2002 Electromechanical and optical properties of torsion-mirror actuators for optical switching applications

Wen-Gang Wu, Dachao Li, Yilong Hao, Guizhen Yan, Shijiu Jin

Author Affiliations +

Proceedings Volume 4907, Optical Switching and Optical Interconnection II; (2002) https://doi.org/10.1117/12.482300
Event: Asia-Pacific Optical and Wireless Communications 2002, 2002, Shanghai, China

Abstract

The electromechanical characteristics of a novel micro torsion-mirror actuator and the optical properties about the light scattering and reflection of its micro-mirror under the influence of mirror surface roughness are investigated experimentally and theoretically. The electrostatic yielding voltages for driving the metal-coated polysilicon or single crystal silicon micro-mirrors suspended by elastic torsion beams to tilt from 0° to 90° spontaneously are in the range of 270~290 V and the minimum holding voltages for keeping the tilting angle of the mirrors to be in 90° are found 55 V or so when the thickness of the torsion-beams is about 1 ?m. The lifetime and the estimated shortest actuating time of the micro torsion-mirror actuators can reach 108 at least and less than 2 ms, respectively. The maximum value of the surface roughness of the micro-mirrors is 69.443 nm and the distribution of the surface roughness is smooth, which is acceptable for wavelength division multiplexing applications basically. In general, the novel torsion-mirror actuators can be applied as optical switches for optical networking.

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Wen-Gang Wu, Dachao Li, Yilong Hao, Guizhen Yan, and Shijiu Jin "Electromechanical and optical properties of torsion-mirror actuators for optical switching applications", Proc. SPIE 4907, Optical Switching and Optical Interconnection II, (3 September 2002); https://doi.org/10.1117/12.482300

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KEYWORDS

Actuators

Micromirrors

Mirrors

Surface roughness

Light scattering

Optical switching

Optical properties

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