Development and research of the scanning method for testing of diffraction optical elements

Valery P. Kiryanov; Vladislav G. Nikitin; Alexander G. Verkhogliad

doi:10.1117/12.484490

29 July 2002 Development and research of the scanning method for testing of diffraction optical elements

Valery P. Kiryanov, Vladislav G. Nikitin, Alexander G. Verkhogliad

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484490
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

The results of scanning method research for testing of diffraction optical elements are shown in this paper. The diffraction efficiency of a specimen of diffraction optical element (Fresnel lens) was measured by the proposed scanning method and by direct (integral) method. Measured data are compared and analyzed. Results of efficiency measurement of diffraction optical element, that produces non-spherical wavefront transformation, are presented and discussed. The parameters of the fulfilled phase profile for these diffractive optical elements are evaluated.

Citation Download Citation

Valery P. Kiryanov, Vladislav G. Nikitin, and Alexander G. Verkhogliad "Development and research of the scanning method for testing of diffraction optical elements", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484490

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