A miniature linear synchronous motor was designed, fabricated and tested. Actuation was achieved through interaction of traveling magnetic wave, generated by linear array of microcoils on a stator, and permanent magnets on a rotor. Two configurations of the motor were investigated. One with a single, hand assembled permanent magnet on rotor and corresponding array of multiturn microcoils, the other, a fully microfabricated rotor with embedded array of screenplated permanent magnets and serpentine microcoils on stator. Motion of the rotor is constrained by silicon dovetail microjoints. A numerical model was developed for modeling and control. The motor was tested under various operating conditions with both open and closed loop control.
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