Review of multilayer normal-incidence gratings operating at 9- to 40-nm wavelengths

John F. Seely

doi:10.1117/12.451353

24 December 2002 Review of multilayer normal-incidence gratings operating at 9- to 40-nm wavelengths

John F. Seely

Proceedings Volume 4782, X-Ray Mirrors, Crystals, and Multilayers II; (2002) https://doi.org/10.1117/12.451353
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

It is now possible to reliably implement multilayer-coated diffraction gratings in spaceflight and laboratory spectrometers that operate at normal incidence and with high efficiency in the 9 nm to 40 nm wavelength range. The design and fabrication of the grating groove profile and the matching multilayer coating are based on computational modeling using the computer program PCGRATE. The multilayer gratings are characterized using atomic force microscopy and by measuring the diffraction efficiency using synchrotron radiation. Recent research has focused on multilayer coatings other than Mo/Si such as Sc/Si for 40 nm, MoRu/Be for 11 nm, and Mo/Y for 9 nm.

Citation Download Citation

John F. Seely "Review of multilayer normal-incidence gratings operating at 9- to 40-nm wavelengths", Proc. SPIE 4782, X-Ray Mirrors, Crystals, and Multilayers II, (24 December 2002); https://doi.org/10.1117/12.451353

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