Synthesis of ZnS:Sm thin films from volatile complex compounds

Elena Nikolaevna Ivanova; Yu. A. Kovalevskaya; Valentin G. Bessreguenev

doi:10.1117/12.452564

26 November 2002 Synthesis ZnS:Sm thin films from volatile complex compounds

Elena Nikolaevna Ivanova, Yu. A. Kovalevskaya, Valentin G. Bessreguenev

Proceedings Volume 4776, Solid State Lighting II; (2002) https://doi.org/10.1117/12.452564
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Deposition and characterization of ZnS, Sm₂S₃ and ZnS:Sm films are described. The films have been prepared by chemical vapor deposition using new volatile complex compounds, dithiocarbamates of Zn and Sm, as precursors. Characterization includes X-ray diffraction, chemical analysis of the film composition, ellipsometry and spectrophotometry. It has been shown that at relatively low temperatures (about 380 °C) monophase crystalline Sm₂S₃ films can be fabricated. Doping of ZnS by Sm with dopant concentration up to 2 at. % has been achieved. Effects of Sm doping on structural and optical properties of the film are presented.

Citation Download Citation

Elena Nikolaevna Ivanova, Yu. A. Kovalevskaya, and Valentin G. Bessreguenev "Synthesis ZnS:Sm thin films from volatile complex compounds", Proc. SPIE 4776, Solid State Lighting II, (26 November 2002); https://doi.org/10.1117/12.452564

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