Micrograting formation with femtosecond ultraviolet laser on optical materials

Hayato Kamioka; Kenichi Kawamura; Taisuke Miura; Masahiro Hirano; Hideo Hosono

doi:10.1117/12.482057

13 September 2002 Micrograting formation with femtosecond ultraviolet laser on optical materials

Hayato Kamioka, Kenichi Kawamura, Taisuke Miura, Masahiro Hirano, Hideo Hosono

Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482057
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States

Abstract

The ability of UV femtosecond laser pulse to fabricate the fine-pitched microgratings on fused silica or ZnO surfaces has been demonstrated through a two-beam laser interference technique. A pump and probe method has been developed to find the time coincidence of the two UV pulses through a laser-induced optical Kerr effect or transient transmission change. The UV pulses achieve to narrow the grating pitches as small as 290nm. The establishment of the technique provides a novel opportunity for the fabrication of periodic nanoscale structures in various materials.

Citation Download Citation

Hayato Kamioka, Kenichi Kawamura, Taisuke Miura, Masahiro Hirano, and Hideo Hosono "Micrograting formation with femtosecond ultraviolet laser on optical materials", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482057

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