Efficient MEMS design methodology integrating finite-element-based macromodels into a nodal-approach MEMS component design tool

David Moulinier; Philippe Nachtergaele; Marie-Pierre Brutails; Stephane Bergeon; Stephane Maza; Christophe Hui Bon Hoa

doi:10.1117/12.462838

19 April 2002 Efficient MEMS design methodology integrating finite-element-based macromodels into a nodal-approach MEMS component design tool

David Moulinier, Philippe Nachtergaele, Marie-Pierre Brutails, Stephane Bergeon, Stephane Maza, Christophe Hui Bon Hoa

Author Affiliations +

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462838
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

Until recently, MEMS design was only handled by experts. This situation resulted from the lack of efficient and easy-to-use integrated tools covering the complete MEMS system design procedure, from individual MEMS component design to complete system simulation. MemsMaster, provided by MEMSCAP, implements a new design methodology for MEMS prototyping. The underlying mechanism to achieve such an objective is the adoption of a library concept supported by a nodal analysis approach. A library is a means of encapsulating of predefined parameterized elements in a standard way so that users can assemble them to design their own systems. Finite element analysis (FEA) methods offer high efficiency and are widely used to model and simulate behavior of MEMS components subject to multiple coupled physical phenomena. However, finite element models may involve large numbers of degrees of freedom (variables) so that full simulation, especially in the case of transient analysis, can be prohibitively expensive. As a consequence, designers must simplify models or limit available results in order to obtain accurate but fast results. Based on Reduced Order Modeling (ROM) MemsModeler, also proved by MEMSCAP, allows MEMS designers to easily and automatically generate a representative behavioral model of a MEMS component from a multiphysics finite element model. These behavioral models are typically well suited to enrich MemsMaster libraries.

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David Moulinier, Philippe Nachtergaele, Marie-Pierre Brutails, Stephane Bergeon, Stephane Maza, and Christophe Hui Bon Hoa "Efficient MEMS design methodology integrating finite-element-based macromodels into a nodal-approach MEMS component design tool", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462838

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