Paper
29 May 2002 Semiconductor nanostructures for quantum wire lasers
D. Piester, A. A. Ivanov, A. S. Bakin, H.-H Wehmann, Andreas Schlachetzki
Author Affiliations +
Proceedings Volume 4748, ICONO 2001: Fundamental Aspects of Laser-Matter Interaction and Physics of Nanostructures; (2002) https://doi.org/10.1117/12.468991
Event: XVII International Conference on Coherent and Nonlinear Optics (ICONO 2001), 2001, Minsk, Belarus
Abstract
We report on the improvements of an InGaAs/InP quantum wire (QWR) laser leading to a new concept of a single QWR laser. Its index/gain guiding structure consists of a vertical waveguide in combination with a laterally patterned semi- insulating current blocking layer with an additional oxide layer, which is realized by a simple self-aligning sub-micrometers lithography step. A further improvement of the structure is possible by reducing the thickness of InP buffer layers, which were necessary due to technological reasons. One InP buffer layer may be omitted completely by increasing the growth temperature from 600 degree(s)C to 640 degree(s)C. By employing metal-organic vapor-phase epitaxy we found a significant increase of In-content of the QWRs at the raised temperature.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. Piester, A. A. Ivanov, A. S. Bakin, H.-H Wehmann, and Andreas Schlachetzki "Semiconductor nanostructures for quantum wire lasers", Proc. SPIE 4748, ICONO 2001: Fundamental Aspects of Laser-Matter Interaction and Physics of Nanostructures, (29 May 2002); https://doi.org/10.1117/12.468991
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KEYWORDS
Etching

Indium gallium arsenide

Photoresist materials

Electrons

Semiconductor lasers

Nanostructures

Scanning electron microscopy

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