Pressurized shape-memory micropumps

Yi-Chung Shu

doi:10.1117/12.474983

11 July 2002 Pressurized shape-memory micropumps

Yi-Chung Shu

Proceedings Volume 4699, Smart Structures and Materials 2002: Active Materials: Behavior and Mechanics; (2002) https://doi.org/10.1117/12.474983
Event: SPIE's 9th Annual International Symposium on Smart Structures and Materials, 2002, San Diego, California, United States

Abstract

We propose a multiscale framework to study the behavior of pressurized shape-memory thin films. These alloy films are typically heterogeneous and contain three length scales including film thickness, grain size and microstructure scale. We show that the effective behavior of shape-memory film exhibits strong size effect due to the interaction among these dimensional and material length scales. In addition, we apply the thin-film theory to predict maximum recoverable deflection for various shape-memory diaphragms with different textures. We find that recoverable deflection is not sensitive to common film textures in Ti-Ni films while it is sensitive in Cu-based shape-memory films. It turns out that Cu-based films may have better behavior than sputtered Ti-Ni films in view of large recoverable deflection. We conclude with comparison with experiment.

Citation Download Citation

Yi-Chung Shu "Pressurized shape-memory micropumps", Proc. SPIE 4699, Smart Structures and Materials 2002: Active Materials: Behavior and Mechanics, (11 July 2002); https://doi.org/10.1117/12.474983

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