V-grooves on LiNbO3 for passive fiber alignment

Qihong Lou; Zhenhuan Ye; T. Li; Jinxing Dong

doi:10.1117/12.472360

1 July 2002 V-grooves on LiNbO₃ for passive fiber alignment

Qihong Lou, Zhenhuan Ye, T. Li, Jinxing Dong

Proceedings Volume 4688, Emerging Lithographic Technologies VI; (2002) https://doi.org/10.1117/12.472360
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

A relative good and economical method has been presented to fabricate V-grooves on LiNbO₃ crystal for passive fiber alignment. It ha been experimentally investigated of excimer laser ablated V-grooves on LiNbO₃ crystal. Two excimer lasers were employed for comparison experiment with the wavelength of 308nm and 193nm respectively. It has been shown that 308nm wavelength performed a poor role in fabricating grooves on LiNbO₃ crystal, particularly on both ablation sped and surface quality, while 193nm wavelength showed excellent performance. The corresponding ablation threshold of LiNbO₃ crysatl at 193nm has been found to be as low as 0.5J/cm². At laser fluence of 3J/cm² and 1200 shots of laser irradiation, V-grooves with some 130 micrometers have been fabricated without visible damage near the grooves. Oxygen buffering atmosphere has been utilized for improving ablation surface cleansing.

Citation Download Citation

Qihong Lou, Zhenhuan Ye, T. Li, and Jinxing Dong "V-grooves on LiNbO₃ for passive fiber alignment", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); https://doi.org/10.1117/12.472360

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