Nanotechnologies and nanolithography in Europe

Jean Charles Guibert

doi:10.1117/12.472291

1 July 2002 Nanotechnologies and nanolithography in Europe

Jean Charles Guibert

Proceedings Volume 4688, Emerging Lithographic Technologies VI; (2002) https://doi.org/10.1117/12.472291
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

European microelectronics industry recovered a strong position within last years, thanks in part to large cooperative programs involving both national and European funding. But, keeping in-line with Moore's law, entering the nano-era requires an increasingly effort in research and development. And for this, Europe again has specific strengths due to the synergy between national and European level initiatives. In the first part of this presentation, we will describe some funding programs and mechanisms for nanotechnologies in Europe, then we will cover some key results of European labs involved in this field and will point out large national initiatives aiming to set-up European centers of excellence in the field of nanotechnologies. In the second part, we will look in depth into the nanolithography activities in Europe, which in fact cover a broad spectrum of technologies, from electron-beam to extreme UV, including nanoimprint or more innovative concepts.

Citation Download Citation

Jean Charles Guibert "Nanotechnologies and nanolithography in Europe", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); https://doi.org/10.1117/12.472291

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available