F2-laser microfabrication of buried waveguide structures in transparent glasses

Xiaoli Midori Wei; Kevin P. Chen; Dragan Coric; Peter R. Herman; Jianzhao Li

doi:10.1117/12.470629

18 June 2002 F₂-laser microfabrication of buried waveguide structures in transparent glasses

Xiaoli Midori Wei, Kevin P. Chen, Dragan Coric, Peter R. Herman, Jianzhao Li

Proceedings Volume 4637, Photon Processing in Microelectronics and Photonics; (2002) https://doi.org/10.1117/12.470629
Event: High-Power Lasers and Applications, 2002, San Jose, California, United States

Abstract

Buried optical waveguides have been fabricated directly in pure bulk fused silica with a novel high-resolution 157-nm optical processing system. Refractive index changes of > 10^-4 were induced within the small focal volume of large numerical-aperture optics, removing the need for ultrafast laser interactions. Single-mode guiding was inferred from Gaussian-like near-field and far-field intensity distributions of 635-nm guided light. The results demonstrate a useful extension of writing buried 3D refractive index structures inside glasses with nanosecond duration UV lasers.

Citation Download Citation

Xiaoli Midori Wei, Kevin P. Chen, Dragan Coric, Peter R. Herman, and Jianzhao Li "F₂-laser microfabrication of buried waveguide structures in transparent glasses", Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); https://doi.org/10.1117/12.470629

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