Experiments and a new model on damping in rare air

Hao Yin; Minhang Bao; Heng Yang; Shaoqun Shen; Bin Xiong

doi:10.1117/12.444694

15 October 2001 Experiments and a new model on damping in rare air

Hao Yin, Minhang Bao, Heng Yang, Shaoqun Shen, Bin Xiong

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444694
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Presented in this paper is an experimental study of squeeze- film air damping in rare air. Experimental beam-mass devices with different gap distances have been designed and fabricated for the experiments and a glass apparatus has been design and set up for measurement in quality factor in low pressure range. The piezoresistive bridge on the beam facilities the measurements of quality factor in vacuum. The pressure coverage in the study is in the range of 10⁵ Pa to below 0.1Pa. The experimental results of quality factor do not agree well with the existing model proposed by Christian, but agree much better with a new model using energy transfer scheme instead of the momentum exchange scheme used by Christian.

Citation Download Citation

Hao Yin, Minhang Bao, Heng Yang, Shaoqun Shen, and Bin Xiong "Experiments and a new model on damping in rare air", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444694

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