Analysis of a novel MEMS electrostatic comb actuator for optical switching

Pei-dong Yu; Guozhong Wang; Minghua Chen; Shizhong Xie

doi:10.1117/12.444744

15 October 2001 Analysis of a novel MEMS electrostatic comb actuator for optical switching

Pei-dong Yu, Guozhong Wang, Minghua Chen, Shizhong Xie

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444744
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Till now, the MEMS switches that have been mostly developed are based on moving micro-mirrors arrays for free-space switching and electrostatic comb drive actuators are widely used because of their simple construction and reliable operation. Here, we report the analysis of a novel MEMS electrostatic comb actuator for optical switching, which can be made with surface micro-machining, and get the performance optimization with high side stability, large displacement and low driving voltage. At the same time, finite element analysis has been used to verify the accuracy of the novel fabric model developed. We have validated the analytical model of the novel electrostatic comb actuators theoretically and numerically.

Citation Download Citation

Pei-dong Yu, Guozhong Wang, Minghua Chen, and Shizhong Xie "Analysis of a novel MEMS electrostatic comb actuator for optical switching", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444744

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