Open loop method for waveform acquisition on electron-beam probe systems

Hui Wang; Hiroyasu Koike; Masayoshi Ikeda; Kenichi Kanai

doi:10.1117/12.444668

15 October 2001 Open loop method for waveform acquisition on electron-beam probe systems

Hui Wang, Hiroyasu Koike, Masayoshi Ikeda, Kenichi Kanai

Proceedings Volume 4600, Advances in Microelectronic Device Technology; (2001) https://doi.org/10.1117/12.444668
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Closed loop waveform acquisition methods on electron-beam probe systems have been used for many years. Its stability and linearity make it reliable and accurate to quantitatively measure the voltage at a probe point on the device under test (DUT). However, the feedback loop keeps decreasing the charging current to the integrator hence slowing the acquisition process. The open loop method can keep the charging current constant so as to speed up the waveform acquisition. Fast acquisition is desirable for productivity and to minimize electron beam induced contamination of the probe-point. By adjusting the loop gain and the filter mesh voltage properly, we developed a method to use the characteristics of the local linearity of S curve to make the open acquisition loop stable and reliable while significantly boosting the acquisition speed. The results show it can be approximately 25 times faster to acquire a waveform from the DUT. Also shown, the open loop method works ideally for measuring small amplitude (<EQ 1 volt) analog signals as well as logic waveforms.

Citation Download Citation

Hui Wang, Hiroyasu Koike, Masayoshi Ikeda, and Kenichi Kanai "Open loop method for waveform acquisition on electron-beam probe systems", Proc. SPIE 4600, Advances in Microelectronic Device Technology, (15 October 2001); https://doi.org/10.1117/12.444668

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