MEMS cantilever beam electrostatic pull-in model

Gary O'Brien; David J. Monk; Liwei Lin

doi:10.1117/12.448834

19 November 2001 MEMS cantilever beam electrostatic pull-in model

Gary O'Brien, David J. Monk, Liwei Lin

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448834
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Two closed form algebraic models describing electrostatic latch and release of micro cantilever beams are presented. The 1st model is based on beam theory with a fixed moment at the boundary to represent the electrostatic force and it predicts that electrostatic pull-in occurs at a beam tip displacement of 46% the initial actuator gap. The 2nd model uses a rigid beam pinned at the anchor with a spring equivalent to the beam's mechanical restoring force attached to the tip and describes electrostatic pull-in occurring at a beam tip deflection of 44% the initial actuator gap. Pull-in voltage measurements of polysilicon cantilever beam arrays (6mm wide, 2mm thick, 160 mm long) correlate to both the 1st and 2nd presented models with errors of 8.2% ((sigma) equals1.3%), and 4.9% ((sigma) equals1.4%), respectively. The 1st and 2nd models were observed to improve pull-in voltage prediction by at least 10.3% and 13.7% respectively when compared to previously presented models without the use of empirical correction factors.

Citation Download Citation

Gary O'Brien, David J. Monk, and Liwei Lin "MEMS cantilever beam electrostatic pull-in model", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448834

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