Force-deflection behavior of piezoelectric actuators

Ashok K. Singh; Pawan Nagpal

doi:10.1117/12.448855

19 November 2001 Force-deflection behavior of piezoelectric actuators

Ashok K. Singh, Pawan Nagpal

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448855
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

In the present endeavour, force - deflection behavior of various piezoelectric actuator configurations has been analyzed for performance comparison. The response of stack actuator has been simulated using MATLAB Simulink, in a stack actuator-pendulum configuration. During simulation, stack actuator has been used in charge control feedback mode, because of the advantage of low hysteresis, and high linearity. The model incorporates three compensation blocks, viz 1) a PID position controller, 2) a PI piezoelectric current controller, and 3) a dynamic force feedback. A typical stack actuator, having 130 layers, 1.20x10^-4 m thickness, 3.46x10^-5m² cross sectional area, of PZT-5H type, has been utilized for simulation. The response of the system has been tested by applying a sinusoidal input of frequency 500 Hz, and waveform amplitude of 1x10^-3V.

Citation Download Citation

Ashok K. Singh and Pawan Nagpal "Force-deflection behavior of piezoelectric actuators", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448855

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