Antiresonant reflecting optical waveguide surface plasmon resonance sensors

Yang-Tung Huang; Wei-Zung Chang; Shih-Hsin Hsu; Chun-Ho Chen; Jou-Chien Chen

doi:10.1117/12.448981

21 November 2001 Antiresonant reflecting optical waveguide surface plasmon resonance sensors

Yang-Tung Huang, Wei-Zung Chang, Shih-Hsin Hsu, Chun-Ho Chen, Jou-Chien Chen

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448981
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

An ARROW-B (antiresonant reflecting optical waveguide, type B) surface plasmon resonance (SPR) sensor operating in aqueous environment is proposed. The characteristics, design, and optimization of the Au-coated ARROW-B SPR sensor are discussed. The operating range of the sensor can be shifted by adding a dielectric overlay. The detectable changes of the refractive index down to the order of 10^-5 can be achieved. The design of an ARROW SPR sensor on Si substrates for detecting hydrogen molecules with palladium as the metal film will also be discussed.

Citation Download Citation

Yang-Tung Huang, Wei-Zung Chang, Shih-Hsin Hsu, Chun-Ho Chen, and Jou-Chien Chen "Antiresonant reflecting optical waveguide surface plasmon resonance sensors", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448981

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