Development of optical MEMS carbon dioxide sensors

Nicholas Moelders; Mark P. McNeal; Martin U. Pralle; Lisa Last; William Ho; Anton C. Greenwald; James T. Daly; Edward A. Johnson; Thomas George; Daniel S. Choi

doi:10.1117/12.443100

2 October 2001 Development of optical MEMS carbon dioxide sensors

Nicholas Moelders, Mark P. McNeal, Martin U. Pralle, Lisa Last, William Ho, Anton C. Greenwald, James T. Daly, Edward A. Johnson, Thomas George, Daniel S. Choi

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Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443100
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

A NDIR-based sensor-chip using MEMS Si micro-bridge elements, with integrated PBG structure for wavelength tuning is discussed. The effects of processing on device performance, especially device release, were investigated. Thermal and electrical device characterization was used to quantify loss mechanisms. Thermally isolated, uniformly heated emitters were ultimately achieved using a backside release etch fabrication process. The fully released devices demonstrated superior electric to thermal (optical) conversion, with the requisite narrow band emission for CO₂ detection. Using the MEMS sensor-chips, 20% CO₂ detection was demonstrated, with projected sensitivities of ~3% CO₂.

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Nicholas Moelders, Mark P. McNeal, Martin U. Pralle, Lisa Last, William Ho, Anton C. Greenwald, James T. Daly, Edward A. Johnson, Thomas George, and Daniel S. Choi "Development of optical MEMS carbon dioxide sensors", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443100

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KEYWORDS

Sensors

Microelectromechanical systems

Silicon

Carbon monoxide

Infrared radiation

Thermal modeling

Thermography

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