Novel technological and constructional solutions of pressure sensors made in LTCC technology

Leszek J. Golonka; Andrzej Dziedzic; Henryk Roguszczak; Szymon Tankiewicz; Damian Terech

doi:10.1117/12.435912

8 August 2001 Novel technological and constructional solutions of pressure sensors made in LTCC technology

Leszek J. Golonka, Andrzej Dziedzic, Henryk Roguszczak, Szymon Tankiewicz, Damian Terech

Proceedings Volume 4516, Optoelectronic and Electronic Sensors IV; (2001) https://doi.org/10.1117/12.435912
Event: Optoelectronic and Electronic Sensors IV, 2000, Gliwice, Poland

Abstract

This paper describes the design, technology aspects and exploitation parameters of thick film pressure sensors manufactured in LTCC technology.

Citation Download Citation

Leszek J. Golonka, Andrzej Dziedzic, Henryk Roguszczak, Szymon Tankiewicz, and Damian Terech "Novel technological and constructional solutions of pressure sensors made in LTCC technology", Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); https://doi.org/10.1117/12.435912

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