Submicron focusing of hard x rays with reflecting surfaces at the ESRF

Olivier Hignette; Gerard Rostaing; Peter Cloetens; Amparo Rommeveaux; Wolfgang Ludwig; Andreas K. Freund

doi:10.1117/12.450227

13 December 2001 Submicron focusing of hard x rays with reflecting surfaces at the ESRF

Olivier Hignette, Gerard Rostaing, Peter Cloetens, Amparo Rommeveaux, Wolfgang Ludwig, Andreas K. Freund

Proceedings Volume 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II; (2001) https://doi.org/10.1117/12.450227
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

We describe Kirkpatrick-Baez (KB) reflecting mirror systems that have been developed at the European Synchrotron Radiation Facility (ESRF). They are intended to be used mainly in the hard x-ray domain from 10 KeV to 30 KeV for microfluorescence, microdiffraction and projection microscopy applications. At 19 KeV a full width at half maximum (FWHM) spot size of 200x600 nanometers has been measured and with an estimated irradiance gain of 3.5x10⁵. The alignment and bending processes of the system are automated based on the wavefront information obtained by sequentially scanning slits and reading a position-sensitive device located in the focal plane. The sub-microradian sensitivity of this method allows us to predict the spot size and ot provide a metrology map of the surfaces for future improvements of the performances. A novel device based on specular reflection by a micromachined platinum mirror has been used to determine the spot size with an equivalent slit size of less than 100 nanometers. Projection phase images of submicron structures are presented which clearly show both the high potential and also the present limitations of the system. First microfluorescence images obtained at 20.6 KeV are shown. Finally, a roadmap towards diffraction-limited performance with metal and multilayer surfaces is presented.

Citation Download Citation

Olivier Hignette, Gerard Rostaing, Peter Cloetens, Amparo Rommeveaux, Wolfgang Ludwig, and Andreas K. Freund "Submicron focusing of hard x rays with reflecting surfaces at the ESRF", Proc. SPIE 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II, (13 December 2001); https://doi.org/10.1117/12.450227

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