Fabrication and testing of planar microlens arrays by ion exchange technique in glass

Jochen Baehr; Ulrich W. Krackhardt; Karl-Heinz Brenner

doi:10.1117/12.450452

13 December 2001 Fabrication and testing of planar microlens arrays by ion exchange technique in glass

Jochen Baehr, Ulrich W. Krackhardt, Karl-Heinz Brenner

Proceedings Volume 4455, Micro- and Nano-optics for Optical Interconnection and Information Processing; (2001) https://doi.org/10.1117/12.450452
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

The mask structured ion exchange in glass (MSI) is a powerful tool for realizing general planar phase distributions and in particular custom designed planar GRIN micro lenses with diffraction limited performance and high fill factor. For lens characterization the numerical aperture is a key parameter. However the classical geometrical definition of the N.A. disregards aberrations. Here we suggest an addition to this classical definition, which is based on diffraction limited performance. For a testing of micro lens arrays, global process parameters are assessed by interferometric measurements of a subset of the lenses. Local process variations typically result in small non-symmetric aberrations. These aberrations mainly lead to a lateral shift of the focus. Thus, for rapid quality control of micro lens arrays we analyze all focal positions in parallel. From the lateral deviations of the focal positions a quality criterion for each individual micro lens can be derived.

Citation Download Citation

Jochen Baehr, Ulrich W. Krackhardt, and Karl-Heinz Brenner "Fabrication and testing of planar microlens arrays by ion exchange technique in glass", Proc. SPIE 4455, Micro- and Nano-optics for Optical Interconnection and Information Processing, (13 December 2001); https://doi.org/10.1117/12.450452

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available