Interferometric figure metrology: enabling in-house traceability

Christopher J. Evans; Angela D. Davies; Tony L. Schmitz; Robert E. Parks

doi:10.1117/12.431256

18 June 2001 Interferometric figure metrology: enabling in-house traceability

Christopher J. Evans, Angela D. Davies, Tony L. Schmitz, Robert E. Parks

Proceedings Volume 4450, Harnessing Light: Optical Science and Metrology at NIST; (2001) https://doi.org/10.1117/12.431256
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

The basic goal of the Advanced Optics Metrology program in NIST's Manufacturing Engineering Laboratory is to help industry ensure that their measurement results of optical figure and wavefront are traceable. This paper underscores the importance of traceability and reviews the facilities and projects dedicated to achieving that objective.

Citation Download Citation

Christopher J. Evans, Angela D. Davies, Tony L. Schmitz, and Robert E. Parks "Interferometric figure metrology: enabling in-house traceability", Proc. SPIE 4450, Harnessing Light: Optical Science and Metrology at NIST, (18 June 2001); https://doi.org/10.1117/12.431256

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