Automated high-accuracy measuring system for specular microreflectivity

Ruediger Grunwald; Stefan Nerreter; Jens Wolfgang Tomm; Sandy Schwirzke-Schaaf; Fabian Doerfel

doi:10.1117/12.450084

10 December 2001 Automated high-accuracy measuring system for specular microreflectivity

Ruediger Grunwald, Stefan Nerreter, Jens Wolfgang Tomm, Sandy Schwirzke-Schaaf, Fabian Doerfel

Proceedings Volume 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II; (2001) https://doi.org/10.1117/12.450084
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

An automated, compact system for high-accuracy measurements of specular reflectivity at different laser wavelengths (633 nm, 822 nm) on the basis of lock-in technique and LabView has been developed. With a spatial resolution of less than 2 micrometers , a signal resolution of less than 10^-4 was obtained. Micro-optical components like microlenses with angular-compensating antireflection coatings, nonuniform micro-mirror arrays, broad-stripe diode laser facets and low-numerical-aperture graded-index microlenses have been characterized by two-dimensional reflectivity mapping. Errors caused by the angular spectrum of the focused polarized probe lasers were analysed.

Citation Download Citation

Ruediger Grunwald, Stefan Nerreter, Jens Wolfgang Tomm, Sandy Schwirzke-Schaaf, and Fabian Doerfel "Automated high-accuracy measuring system for specular microreflectivity", Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); https://doi.org/10.1117/12.450084

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