Quantitative analysis of mask error effect on wafer CD variation in ArF lithography

Sang-Jin Kim; Sang-Sool Koo; Seo-Min Kim; Chang-Nam Ahn; Young-Mog Ham; Ki-Soo Shin

doi:10.1117/12.438344

5 September 2001 Quantitative analysis of mask error effect on wafer CD variation in ArF lithography

Sang-Jin Kim, Sang-Sool Koo, Seo-Min Kim, Chang-Nam Ahn, Young-Mog Ham, Ki-Soo Shin

Proceedings Volume 4409, Photomask and Next-Generation Lithography Mask Technology VIII; (2001) https://doi.org/10.1117/12.438344
Event: Photomask and Next Generation Lithography Mask Technology VIII, 2001, Kanagawa, Japan

Abstract

This paper describes the effect of the mask errors such as mask critical dimension (CD) variation, phase and transmission error of attenuated phase shifting mask (att-PSM) on wafer CD in ArF lithography and also analyzes these errors quantitatively. Mask CD requirement using ELF and MEF is estimated firstly and mask CD should be controlled within about 7nm assuming O.7ONA ArF system with 1% illumination uniformity. Transmission error induces larger CD variation than phase error. However, phase error should be considered otherwise in that it reduces depth of focus (DOF). To control DOF degradation less than 10% in case of O.l4um and O.l6um isolated contact hole(C/H), the phase should be controlled within the range of Considering O.l4um isolated contact hole, transmission error of occupies 10% of CD tolerance. Finally, the budget of these factors are calculated in view of total wafer CD variation quantitatively except lens aberration, resist process, and etc. To reduce wafer CD variation, we should control mask CD more tightly.

Citation Download Citation

Sang-Jin Kim, Sang-Sool Koo, Seo-Min Kim, Chang-Nam Ahn, Young-Mog Ham, and Ki-Soo Shin "Quantitative analysis of mask error effect on wafer CD variation in ArF lithography", Proc. SPIE 4409, Photomask and Next-Generation Lithography Mask Technology VIII, (5 September 2001); https://doi.org/10.1117/12.438344

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