Self-parking fiber and self-latching vertical mirror for fiber optical switch array

S.C. Shen; Cheng-Tang Pan; Hwai-Pwu Chou

doi:10.1117/12.425328

30 April 2001 Self-parking fiber and self-latching vertical mirror for fiber optical switch array

S.C. Shen, Cheng-Tang Pan, Hwai-Pwu Chou

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425328
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

The paper presents an innovative concept of self-parking ideal in v-groove and self-latching vertical mirror on the suspension diaphragm with technique out of plane fiber-optical switch arrays was fabricated. The self-parking ideal offers an integration by which the distance between optical fiber and mirror can be minimizes. The self-latching vertical mirror located on the suspension diaphragm that is supported by four cantilever beams. At first, it is achieved by bulk micromachining and is ablated by mask projection of 248 nm excimer laser. The vertical mirror structure was fabricated by thick photoresist as SU-8 through UV lithography and then sputters gold films. The fiber-optical switch solves in plane micro-optical that require large moving space, microassembly problem of fiber to mirror distance and reducing the roughness of mirror surface. In the experiment, out of plane micro-optical switch are successfully achieved by above key process. By the measurement of roughness of mirror must be less than 20 nm rms. The reflectivity of the gold films mirror by a wavelength of 1310 nm is higher than 85%. The micro-optical switch has maximum displacement 48 micrometers and switching time is below 0.4 ms with driving voltage 100 V DC.

Citation Download Citation

S.C. Shen, Cheng-Tang Pan, and Hwai-Pwu Chou "Self-parking fiber and self-latching vertical mirror for fiber optical switch array", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425328

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