Novel equipment for friction force measurement on MEMS and microcomponents

Martin Schmidt; Andreas Wortmann; Holger Luethje; Stephanus Buettgenbach

doi:10.1117/12.425297

30 April 2001 Novel equipment for friction force measurement on MEMS and microcomponents

Martin Schmidt, Andreas Wortmann, Holger Luethje, Stephanus Buettgenbach

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425297
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

The importance of micro actuators will increase dramatically in the near future. Micro actuators are only capable of generating low forces, therefore surfaces in dynamic contact must be tribologically optimized. Since component and thin film properties may differ from their bulk material behavior and in order to investigate the influence of the components' geometries, it is important to investigate the effect of friction in micro actuators under comparable test conditions. To enable such in-situ investigations two testing units have been designed and built up at the IMT and IST. We report on the design of these devices.

Citation Download Citation

Martin Schmidt, Andreas Wortmann, Holger Luethje, and Stephanus Buettgenbach "Novel equipment for friction force measurement on MEMS and microcomponents", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425297

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available