Chemical dissolution of III-V and II-VI semiconductor compounds in solutions of HNO3-HCl-lactic acid system

V. N. Tomashik; Z. F. Tomashik; S. G. Danylenko; Ye. O. Bilevych

doi:10.1117/12.417792

22 February 2001 Chemical dissolution of III-V and II-VI semiconductor compounds in solutions of HNO₃-HCl-lactic acid system

V. N. Tomashik, Z. F. Tomashik, S. G. Danylenko, Ye. O. Bilevych

Author Affiliations +

Proceedings Volume 4355, Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics; (2001) https://doi.org/10.1117/12.417792
Event: Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics, 2000, Kiev, Ukraine

Abstract

The nature of CdTe, Cd_1-XZn_XTe solid solutions, InAs and InSb dissolution in the mixture of HNO₃-HCl-lactic acid system are investigated. The surfaces of equal etching rates (Gibbs diagrams) are constructed, limiting stages of dissolution process and regions of polishing solutions in this system are determined.

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V. N. Tomashik, Z. F. Tomashik, S. G. Danylenko, and Ye. O. Bilevych "Chemical dissolution of III-V and II-VI semiconductor compounds in solutions of HNO₃-HCl-lactic acid system", Proc. SPIE 4355, Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (22 February 2001); https://doi.org/10.1117/12.417792

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