3D finite element modeling of the micromachined microphone with corrugated diaphragm

Alexei I. Borovkov; Evgenij N. Pyatishev; Mihail S. Lurie; Andrey V. Korshunov; Y. D. Akulshin; V. O. Sabadash; B. A. Smolnikov

doi:10.1117/12.417673

1 February 2001 3D finite element modeling of the micromachined microphone with corrugated diaphragm

Alexei I. Borovkov, Evgenij N. Pyatishev, Mihail S. Lurie, Andrey V. Korshunov, Y. D. Akulshin, V. O. Sabadash, B. A. Smolnikov

Author Affiliations +

Proceedings Volume 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2001) https://doi.org/10.1117/12.417673
Event: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 2000, St. Petersburg, Russian Federation

Abstract

Measurements of acoustic pressure oscillations on curvilinear surface streamlined by a flow, for example, on the wall of wind-tunnel or airfoil is necessary to supply for aeroacoustic appendices. Microphone should have the minimal sizes and feeler set flush-mounted. Such microphones are demanded for creation distributed audio-systems and noise reduction devices in the source. Developed the MEMS-microphone with corrugated diaphragm should have a sharp response, stability to effects of ram airflow and high level pressure. Preliminary simulation of design and technological parameters is necessary for creation of this microphone.

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Alexei I. Borovkov, Evgenij N. Pyatishev, Mihail S. Lurie, Andrey V. Korshunov, Y. D. Akulshin, V. O. Sabadash, and B. A. Smolnikov "3D finite element modeling of the micromachined microphone with corrugated diaphragm", Proc. SPIE 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (1 February 2001); https://doi.org/10.1117/12.417673

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