Experimental model verification of the thermal response of optical reticles

Amr Y. Abdo; Phillip L. Reu; Michael P. Schlax; Roxann L. Engelstad; William A. Beckman; John W. Mitchell; Edward G. Lovell

doi:10.1117/12.435687

14 September 2001 Experimental model verification of the thermal response of optical reticles

Amr Y. Abdo, Phillip L. Reu, Michael P. Schlax, Roxann L. Engelstad, William A. Beckman, John W. Mitchell, Edward G. Lovell

Author Affiliations +

Proceedings Volume 4346, Optical Microlithography XIV; (2001) https://doi.org/10.1117/12.435687
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

To extend optical lithography technology to the sub-100 nm linewidth regime, all mask-related distortions must be eliminated or minimized. Thermal distortion during the exposure process can be a significant contribution to the total pattern placement error budget for advanced photomasks. Consequently, several finite element (FE) models were developed to predict the thermal and the mechanical response of the optical reticle during exposure. This paper presents the experimental verification of the FE thermal models. In particular, the results of the numerical simulation were compared with the experimental data and excellent agreement was found.

Citation Download Citation

Amr Y. Abdo, Phillip L. Reu, Michael P. Schlax, Roxann L. Engelstad, William A. Beckman, John W. Mitchell, and Edward G. Lovell "Experimental model verification of the thermal response of optical reticles", Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); https://doi.org/10.1117/12.435687

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