Extreme-ultraviolet sources for lithography applications

Vadim Banine; Johannes Moors

doi:10.1117/12.436651

20 August 2001 Extreme-ultraviolet sources for lithography applications

Vadim Banine, Johannes Moors

Proceedings Volume 4343, Emerging Lithographic Technologies V; (2001) https://doi.org/10.1117/12.436651
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

The source is a critical factor for the success of Extreme Ultraviolet Lithography (EUVL). This paper presents an update of the EUV source requirements. A comparison of the currently measured source performance with the specification is presented. For the source choice, it is also essential to understand the limits of the source and the way the source or the total source/lithography system could be improved to meet the lithography tool requirements in time. Although none of the currently known plans is compliant with requirements for an EUVL production tool, significant further improvement of their performance in the future seems feasible. Detailed analysis of the source requirements and the way to meet production tool specification, including increase in repetition rate for all the sources, are presented. Increase in energy per pulse, determined by dose reproducibility limit, for some of the sources is also discussed. Additional attention is paid to optimization of the tool wavelength and heat load within the source chamber and of the optical components due to of-band source radiation.

Citation Download Citation

Vadim Banine and Johannes Moors "Extreme-ultraviolet sources for lithography applications", Proc. SPIE 4343, Emerging Lithographic Technologies V, (20 August 2001); https://doi.org/10.1117/12.436651

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available