3D modeling from AFM measurements

Timothee Jost; Heinz Huegli

doi:10.1117/12.429364

5 June 2001 3D modeling from AFM measurements

Timothee Jost, Heinz Huegli

Proceedings Volume 4275, Metrology-based Control for Micro-Manufacturing; (2001) https://doi.org/10.1117/12.429364
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

There exist many techniques for the measurement of micro and nano surfaces and also several conventional ways to represent the resulting data, such as pseudo color or isometric 3D. This paper addresses the problem of building complete 3D micro-object models from measurements in the submicrometric range. More specifically, it considers measurements provided by an atomic-force microscope and investigates their possible use for the modeling of small 3D objects. The general approach for building complete virtual models requires to measure and merge several data sets representing the considered object observed under different orientations, or views.

Citation Download Citation

Timothee Jost and Heinz Huegli "3D modeling from AFM measurements", Proc. SPIE 4275, Metrology-based Control for Micro-Manufacturing, (5 June 2001); https://doi.org/10.1117/12.429364

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