Magnetic MEMS used in smart structures which exploit magnetic materials properties

Ronald B. Zmood; LiJiang Qin; Dinesh K. Sood; Thurai Vinay; D. Meyrick

doi:10.1117/12.420856

21 March 2001 Magnetic MEMS used in smart structures which exploit magnetic materials properties

Ronald B. Zmood, LiJiang Qin, Dinesh K. Sood, Thurai Vinay, D. Meyrick

Proceedings Volume 4235, Smart Structures and Devices; (2001) https://doi.org/10.1117/12.420856
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

Abstract

Magnetic MEMS technology, by exploiting the special properties of magnetic materials, offers many challenging possibilities for useful device development in the future. In this paper we explore some of the magnetic materials used in MEMS devices, and methods of fabricating them. Some of the key design issues are briefly addressed and applications of this technology to electromagnetic devices developed at RMIT and to thermally controlled magnetic devices, which are of increasing interest, are examined.

Citation Download Citation

Ronald B. Zmood, LiJiang Qin, Dinesh K. Sood, Thurai Vinay, and D. Meyrick "Magnetic MEMS used in smart structures which exploit magnetic materials properties", Proc. SPIE 4235, Smart Structures and Devices, (21 March 2001); https://doi.org/10.1117/12.420856

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