Pyroelectric properties of sol-gel-derived (Pb,Mg)TiO3 thin film detectors

Ying-Chung Chen; Chih-Ming Wang; Ming-Cheng Kao; Yun-Hsing Lai

doi:10.1117/12.424422

6 April 2001 Pyroelectric properties of sol-gel-derived (Pb,Mg)TiO₃ thin film detectors

Ying-Chung Chen, Chih-Ming Wang, Ming-Cheng Kao, Yun-Hsing Lai

Proceedings Volume 4234, Smart Materials; (2001) https://doi.org/10.1117/12.424422
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

Abstract

High-performance pyroelectric infrared (IR) detectors have been fabricated without the back side etching process using Mg-modified lead titanate (Pb_1-xMg_xTiO₃) thin films. PMT thin films were deposited on (111)-oriented Pt thin film on SiO₂/Si(100) substrates by a diol-based sol-gel process. The randomly oriented PMT thin film exhibits a relatively small dielectric constant and a large pyroelectric coefficient without poling treatment. The pyroelectric characteristics of point detector with various Mg contents as a function of modulation frequency are compared. It was found that the PMT(6) thin film detector has a large voltage responsivity of 5280 (V/W) at 20 Hz. The specific detectivity (D*) at 100 Hz is 5.12 X 10⁷ cmHz^1/2/W. The results showed that Pb_1-xMg_xTiO₃ thin film with x equals 0.06 [PMT(6)] was most suitable for use as a pyroelectric IR detector.

Citation Download Citation

Ying-Chung Chen, Chih-Ming Wang, Ming-Cheng Kao, and Yun-Hsing Lai "Pyroelectric properties of sol-gel-derived (Pb,Mg)TiO₃ thin film detectors", Proc. SPIE 4234, Smart Materials, (6 April 2001); https://doi.org/10.1117/12.424422

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