Directly electroplated microstructure

Alan R. Wilson; Richard F. Muscat; Ian Jackson; Christina Olsson-Jacques; John Retchford

doi:10.1117/12.424414

6 April 2001 Directly electroplated microstructure

Alan R. Wilson, Richard F. Muscat, Ian Jackson, Christina Olsson-Jacques, John Retchford

Proceedings Volume 4234, Smart Materials; (2001) https://doi.org/10.1117/12.424414
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

Abstract

Structures have been electroplated directly to metal (Al) pads on Si wafers using only the metal pad geometry to define the position and shape of the electroplated pad. No further processing steps are required after the electroplating. These pads have been used to form the sensing elements in an adhesive bond degradation sensor. Other uses could include the electroplating of high density materials to increase inertial/accelerometer sensor mass for higher sensitivity. The electroplating has been performed on Al pads formed in a CMOS compatible process on whole Si wafers. Multiple 'bus bars' connected to different sensor pads have been used to simultaneously electroplate structures with different heights. Both zincating and evaporation of a Cu seed layer on the Si substrate followed by electroplating have been investigated to determine the parameters to achieve optimum Cu cover and the best adhesion of the electroplated Cu to the Al/wafer. This involved the development of a test to measure the adhesion of 100 micrometer X 100 micrometer electroplated Cu studs on a silicon wafer.

Citation Download Citation

Alan R. Wilson, Richard F. Muscat, Ian Jackson, Christina Olsson-Jacques, and John Retchford "Directly electroplated microstructure", Proc. SPIE 4234, Smart Materials, (6 April 2001); https://doi.org/10.1117/12.424414

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available