Optimizing parameters for computer-controlled polishing precision planar mirror

Qiao Xu; Jinm Wang; Jie Yu; Fuxing Yang

doi:10.1117/12.402791

6 October 2000 Optimizing parameters for computer-controlled polishing precision planar mirror

Qiao Xu, Jinm Wang, Jie Yu, Fuxing Yang

Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402791
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China

Abstract

A quantitative expression for mid-spatial frequency error of the large planar mirror fabricated by computer controlled polishing is employed in terms of wavefront's power spectral density (PSD). The PSD information is calculated from wavefront measured by large phase shifted interferometer. The optimized process parameters are investigated to reduce the mid-spatial frequency error with adequate efficiency to meet the conventional requirements such as P-V and RMS wavefront errors. Based on the criteria of efficiency and PSD, the optimized parameters have been obtained for fabricating precision planar mirror. As an application, a 270 mm x 270 mm x 30 mm mirror has been finished after 10 polishing hours. The P-V value of the reflective wavefront is 0.19 λ (λ= 0.6328μm), and the PSD distribution has also met the requirements.

Citation Download Citation

Qiao Xu, Jinm Wang, Jie Yu, and Fuxing Yang "Optimizing parameters for computer-controlled polishing precision planar mirror", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402791

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